Aluminum Nitride

Aluminum Nitride

Aluminum Nitride substrates possess thermal gradient properties that allow for superior heat uniformity. These chemically "clean" substrates meet tough clean room environment requirements for the semiconductor, medical and other stringent applications. Heaters applied to this substrate are extremely versatile due to the ability to formulate heaters that have good mechanical strength with low inertial mass. Extremely powerful heaters from very small sizes can be fabricated with the ability to reach temperatures in excess of 500°C in a matter of seconds and cool down almost as rapidly. Heaters have been tested with watt densities of over 500 watts per square inch.


Temperatures up to 450 oC
Dimensions: From .08” x .08” to as large as 16” x 30”. With thicknesses ranging from .0165” to .197”
Voltages: From 3 volts to 300 volts – AC or DC current
Wattage: Up to 500 watts/sq in.
Thermal Conductivity 170 watts/m°K


Excellent wear properties
Superior moisture and chemical resistance
Excellent dielectric properties
Low thermal expansion
Superior thermal shock properties

Low Mass/High Thermal Conductivity (170 Watts/mOK)

Energy efficient
Quick heat up/cool down rates
Temperature uniformity

Large Surface Area Coverage – Up to 99%

Lower operating temperatures
Better temperature control
Less hot/cold spots
Quick heat up rates
Superior temperature uniformity
Energy efficient

High Watt Density

Quicker heat up rates
Higher temperatures


No out gassing
Can be used in clean room environments

Multiple Segment Design

Customizable heat distribution
Better temperature control and uniformity


Medical - CPAP and Vapor Systems, Diagnostic Equipment, Blood Analysis, Drug Delivery
Industrial - Chemical Detection, Mass-Spectrometers
Appliance/Electronics - Fuser Heaters
Semi-Conductor - Wafer Chuck, Chemical Processing, Chip Burn-in
Military/Aerospace - Chemical Detection